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FAAS 8000ICS online cation and anion monitoring system
The FAAS 8000ICS online cation and anion monitoring system adopts impact gas absorption technology combined with ion chromatography analysis method to
Product details
product overview
The FAAS 8000ICS online cation and anion monitoring system adopts impact gas absorption technology combined with ion chromatography analysis method to achieve fully automatic online monitoring functions such as multi-point sampling, automatic gas absorption enrichment, and online quality control. It solves the problems of large personnel input, low data monitoring frequency, and untimely data feedback in the AMC monitoring process of clean rooms; Can be applied to online monitoring of acidic substances (MA) and alkaline substances (MB) pollutants in gaseous molecular pollutants (AMC) in semiconductor plant areas.
Product Features
Reliable data
The system has achieved full automation of the entire process, including automatic remote sampling, automatic enrichment and absorption, automatic quality control, automatic analysis, and automatic data upload.
Avoiding the introduction of manual errors, ensuring accurate and reliable data.
HIGH SENSITIVITY
Large volume injection concentration significantly improves the system's detection capability, with a detection limit of sub ppt level, shortening the system's operating cycle.
Wide monitoring coverage
A single system can be configured with up to 32 sample collection points;
The system uses a vacuum pump for remote sampling, which can cover online monitoring of samples within a range of 300m.
Design compliance
The system pipeline and valve group are designed with clean polytetrafluoroethylene material to meet the control requirements for precipitation impurities in SEMI F57.
Efficient absorption
The online dual absorption module design is beneficial for saving sample analysis time and achieving faster and more efficient data output!
application area
The AAS 8000ICS online cation monitoring system is mainly used for online monitoring of water-soluble acidic and alkaline pollutants in clean room ambient air, and can be extended to the detection of ion pollutants in the atmosphere.
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